Grinding powders

[Applied Field]

• Making the polishing pad

[Technology Parameters]

Model		R112	R113	R114
Color		Yellowish	Yellowish	Yellowish
D50 (nm)		26−30	22−26	18−22
pH		6.5−6.8	6.5−6.8	6.5−6.8
Chemical Composition	TREO (%)	> 99	> 99	> 99
	CeO2/ReO (%)	> 99.9	> 99.9	> 99.9

	TEM picture (500:1)	Partical diameter distriburtion
R112
R113
R114

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