Coarse polishing powders

[Applied Field]

• Making the polishing pad or classical low speed polishing

[Technology Parameters]

Model		R115	R116	R117
Color		Yellowish	Yellowish	Yellowish
D50 (nm)		14−18	10−14	2−6
pH		7.0−7.5	7.0−7.5	7.0−7.5
Chemical Composition	TREO (%)	> 99	> 99	> 99
	CeO2/ReO (%)	> 99	> 99	> 99

	TEM picture	Partical diameter distriburtion
R115	(500:1)
R116	(500:1)
R117	(2500:1)

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